FEM modelling of MEMS cantilever surface

[niranjan_avate]

Hi
anyone can help me by providing some refernces for modelling of MEMS cantilever surface and its analysis

thank you

[Jorgen]

Prof. William N. Sharpe at the Johns Hopkins University has done a lot of work on MEMS structures, both experimental and modeling. Do a literature search on his name.

- Jorgen

[niranjan_avate]

thanx :)